Handbook of Silicon Semiconductor Metrology

Handbook of Silicon Semiconductor Metrology


Containing greater than three hundred equations and approximately 500 drawings, photos, and micrographs,
this reference surveys key components equivalent to optical measurements and in-line calibration tools. It describes cleanroom-based size expertise used in the course of the manufacture of silicon built-in circuits and covers model-based, serious measurement, overlay, acoustic movie thickness, dopant dose, junction intensity, and electric measurements; particle and disorder detection; and flatness following chemical mechanical sharpening. supplying examples of well-developed metrology power, the e-book specializes in metrology for lithography, transistor, capacitor, and on-chip interconnect procedure applied sciences.

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